Organometallic vapor-phase epitaxy : theory and practice

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Organometallic vapor-phase epitaxy :...

Organometallic vapor-phase epitaxy : theory and practice

Name: Organometallic vapor-phase epitaxy : theory and practice
ISBN: 9780126738421

G B Stringfellow

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Organometallic Vapor-Phase Epitaxy describes the operation of a particular technique for the production of compound semiconductor materials. It describes how the technique works, how it can be used for the growth of particular materials and structures, and the application of these materials for specific devices. It contains not only a fundamental description of the operation of the technique but also contains lists of data useful for the everyday operation of OMVPE reactors. It also offers specific recipes that can be used to produce a wide range of specific materials, structures, and devices.

Категорії:

Engineering

Рік:

1999

Видання:

2nd ed

Видавництво:

Academic Press

Мова:

english

Сторінки:

589